| 000 | 00317nam a2200109Ia 4500 | ||
|---|---|---|---|
| 008 | 140917b1982 xxu||||| |||| 00| 0 eng d | ||
| 082 | _a621.38173, ELL | ||
| 100 | _aDavid J Elliott | ||
| 245 | _aIntegrated Circuit fabrication technolog_y | ||
| 260 |
_aNew York : _bMc Graw Hill, _c1982 |
||
| 700 | _aElliott, David J | ||
| 999 |
_c207633 _d207633 |
||